Introduction to Focused Ion Beam Nanometrology by David C. Cox (English) Hardcov

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Describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology.

FORMATHardcover LANGUAGEEnglish CONDITIONBrand New Publisher Description

This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology. Beginning with a description of the currently available instruments including the new addition to the field of plasma-based sources, it then gives an overview of ion solid interactions and how the different types of instrument can be applied. Chapters then describe how these machines can be applied to the field of materials science and device fabrication giving examples of recent and current activity in both these areas.

Author Biography

David C Cox received his PhD from the department of Metallurgy and Materials Science University of Cambridge, UK in 2001. He is currently a senior research fellow at the Advanced Technology Institute, University of Surrey, UK and has been seconded to the National Physical Laboratory, UK as a senior research scientist since 2005. Having a broad background in industry and academia covering many aspects of materials science, physics and electronic engineering, he has published close to 100 articles at the time of writing. Largely associated with both the Quantum Metrology and Materials groups at NPL, his most recent research work has concentrated on the area of using focused ion beam to fabricate devices for quantum metrology. Additionally, he has developed a strong interest in wider aspects of FIB fabrication and fundamental understanding of how focused ion beam can be used to study materials and the errors associated with aspects of the technique.

Table of Contents

1. Metrology2. Focused Ion Beam3. Ion-Solid Interactions4. Focused Ion Beam - Materials Science Applications5. Focused Ion Beam Fabrication for Metrology6. Future Developments

Long Description

This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology. Beginning with a description of the currently available instruments including the new addition to the field of plasma-based sources, it then gives an overview of ion solid interactions and how the different types of instrument can be applied. Chapters then describe how these machines can be applied to the field of materials science and device fabrication giving examples of recent and current activity in both these areas.

Details ISBN1643278460 Author David C. Cox Pages 104 Publisher Morgan & Claypool Publishers Language English Year 2015 ISBN-10 1643278460 ISBN-13 9781643278469 Format Hardcover Series IOP Concise Physics Imprint Morgan & Claypool Publishers Place of Publication San Rafael Country of Publication United States AU Release Date 2015-10-01 NZ Release Date 2015-10-01 UK Release Date 2015-10-01 Publication Date 2015-10-30 Audience General US Release Date 2015-10-30 We've got this

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