Handbook of Chemicals and Gases for the Semiconductor Industry by Jeremiah D. Ho

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This book brings together the most useful and important data on chemicals and gases used in the manufacture of semiconductor devices. It offers an A-to-Z listing of physical properties and safety information for more than 270 chemicals and gases used in the manufacture of semiconductor chips.

FORMATHardcover LANGUAGEEnglish CONDITIONBrand New Publisher Description

The first comprehensive guide to the chemicals and gases used in semiconductor manufacturing The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. Until now, there has been no convenient source of information on the properties, applications, and health and safety considerations of the chemicals used in these processes. The Handbook of Chemicals and Gases for the Semiconductor Industry meets this need. Each of the Handbook's eight chapters is related to a specific area of semiconductor processing. The authors provide a brief overview of each step in the process, followed by tables containing physical properties, handling, safety, and other pertinent information on chemicals and gases typically used in these processes. The 270 chemical and gas entries include data on physical properties, emergency treatment procedures, waste disposal, and incompatible materials, as well as descriptions of applications, chemical mechanisms involved, and references to the literature. Appendices cross-reference entries by process, chemical name, and CAS number. The Handbook's eight chapters are:Thin Film Deposition MaterialsWafer Cleaning MaterialsPhotolithography MaterialsWet and Dry Etching MaterialsChemical Mechanical Planarizing MethodsCarrier GasesUncategorized MaterialsSemiconductor Chemicals Analysis No other single source brings together these useful and important data on chemicals and gases used in the manufacture of semiconductor devices. The Handbook of Chemicals and Gases for the Semiconductor Industry will be a valuable reference for process engineers, scientists, suppliers to the semiconductor industry, microelectronics researchers, and students.

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The first comprehensive guide to the chemicals and gases used in semiconductor manufacturing The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. Until now, there has been no convenient source of information on the properties, applications, and health and safety considerations of the chemicals used in these processes. The Handbook of Chemicals and Gases for the Semiconductor Industry meets this need. Each of the Handbook’s eight chapters is related to a specific area of semiconductor processing. The authors provide a brief overview of each step in the process, followed by tables containing physical properties, handling, safety, and other pertinent information on chemicals and gases typically used in these processes. The 270 chemical and gas entries include data on physical properties, emergency treatment procedures, waste disposal, and incompatible materials, as well as descriptions of applications, chemical mechanisms involved, and references to the literature. Appendices cross-reference entries by process, chemical name, and CAS number. The Handbook’s eight chapters are: Thin Film Deposition Materials Water Cleaning Chemicals Photolithography Materials Wet and Dry Etching Materials Chemical Mechanical Planarizing Materials Carrier Gases Uncategorized Materials Semiconductor Chemicals Analysis No other single source brings together these useful and important data on chemicals and gases used in the manufacture of semiconductor devices. The Handbook of Chemicals and Gases for the Semiconductor Industry will be a valuable reference for process engineers, scientists, suppliers to the semiconductor industry, microelectronics researchers, and students.

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The first comprehensive guide to the chemicals and gases used in semiconductor manufacturing The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. Until now, there has been no convenient source of information on the properties, applications, and health and safety considerations of the chemicals used in these processes. The Handbook of Chemicals and Gases for the Semiconductor Industry meets this need. Each of the Handbook 's eight chapters is related to a specific area of semiconductor processing. The authors provide a brief overview of each step in the process, followed by tables containing physical properties, handling, safety, and other pertinent information on chemicals and gases typically used in these processes. The 270 chemical and gas entries include data on physical properties, emergency treatment procedures, waste disposal, and incompatible materials, as well as descriptions of applications, chemical mechanisms involved, and references to the literature. Appendices cross-reference entries by process, chemical name, and CAS number. The Handbook's eight chapters are: Thin Film Deposition Materials Water Cleaning Chemicals Photolithography Materials Wet and Dry Etching Materials Chemical Mechanical Planarizing Materials Carrier Gases Uncategorized Materials Semiconductor Chemicals Analysis No other single source brings together these useful and important data on chemicals and gases used in the manufacture of semiconductor devices. The Handbook of Chemicals and Gases for the Semiconductor Industry will be a valuable reference for process engineers, scientists, suppliers to the semiconductor industry, microelectronics researchers, and students.

Author Biography

ASHUTOSH MISRA is Director of Applications and New Product Development for Air Liquide Electronics, Inc. JEREMIAH D. HOGAN is Director of Physical Analysis Laboratories for Texas Instruments, Inc. RUSSELL A. CHORUSH is an associate at the law firm of Conley, Rose and Tayon, PC.

Table of Contents

Thin Film Deposition Materials.Wafer Cleaning Chemicals.Photolithography Materials.Wet and Dry Etching Materials.Chemical Mechanical Planarizing Materials.Carrier Gases.Uncategorized Materials.Semiconductor Chemicals Analysis.Index.

Long Description

The first comprehensive guide to the chemicals and gases used in semiconductor manufacturing The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. Until now, there has been no convenient source of information on the properties, applications, and health and safety considerations of the chemicals used in these processes. The Handbook of Chemicals and Gases for the Semiconductor Industry meets this need. Each of the Handbook s eight chapters is related to a specific area of semiconductor processing. The authors provide a brief overview of each step in the process, followed by tables containing physical properties, handling, safety, and other pertinent information on chemicals and gases typically used in these processes. The 270 chemical and gas entries include data on physical properties, emergency treatment procedures, waste disposal, and incompatible materials, as well as descriptions of applications, chemical mechanisms involved, and references to the literature. Appendices cross-reference entries by process, chemical name, and CAS number. The Handbooks eight chapters are: Thin Film Deposition Materials Water Cleaning Chemicals Photolithography Materials Wet and Dry Etching Materials Chemical Mechanical Planarizing Materials Carrier Gases Uncategorized Materials Semiconductor Chemicals Analysis No other single source brings together these useful and important data on chemicals and gases used in the manufacture of semiconductor devices. The Handbook of Chemicals and Gases for the Semiconductor Industry will be a valuable reference for process engineers, scientists, suppliers to the semiconductor industry, microelectronics researchers, and students.

Feature

Each entry includes data on emergency treatment procedures, safe handling, waste disposal, incompatible materials, purity requirements, and suppliers. Provides descriptions of applications, chemical processes involved, as well as references to the literature for each entry. Appendices cross-reference entries by chemical process, chemical name, and chemical formula. An introductory chapter gives an overview of the methods used to analyze the purity of chemicals and gases.

Details ISBN0471316717 Short Title HANDBK OF CHEMICALS & GASES FO Language English ISBN-10 0471316717 ISBN-13 9780471316718 Media Book Format Hardcover Illustrations Yes Year 2002 Place of Publication New York Country of Publication United States Edition 1st DOI 10.1604/9780471316718 UK Release Date 2002-04-05 AU Release Date 2002-03-22 NZ Release Date 2002-03-22 Author Ashutosh Misra Pages 384 Publisher John Wiley & Sons Inc Publication Date 2002-04-05 Imprint Wiley-Interscience DEWEY 661 Audience Professional & Vocational US Release Date 2002-04-05 We've got this

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